7.3 RF GaN/Si HEMT Growth Development Using Single Wafer MOCVD Technology

Ming Pan, Veeco Instruments
Soo-Min Lee, Veeco Instruments
Jie Su, Veeco Instruments
Eric Tucker, Veeco Instruments
Randhir Bubber, Veeco Instruments
Somit Joshi, Veeco Instruments
Ajit Paranjpe, Veeco Instruments
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