7.3 RF GaN/Si HEMT Growth Development Using Single Wafer MOCVD Technology

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Ming Pan, Veeco Instruments

Soo-Min Lee, Veeco Instruments

Jie Su, Veeco Instruments

Eric Tucker, Veeco Instruments

Randhir Bubber, Veeco Instruments

Somit Joshi, Veeco Instruments

Ajit Paranjpe, Veeco Instruments

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