7.4.2023 Development of GaN-on-Ga2O3 Heterostructures for Vertical Power Devices

Frank Kelly, University of Illinois at Urbana-Champaign
Matthew Landi, University of Illinois at Urbana-Champaign
Riley Vesto, University of Illinois at Urbana-Champaign
Marko J. Tadjer, U.S. Naval Research Laboratory
Kyekyoon Kim, University of Illinois at Urbana-Champaign

7.4.2023 CSManTech2023_Extended_Abstract_FPK_3-3-23_paper7-4_final