8.1.2021 Demonstration of High-quality GaN Epitaxy on 200 mm Engineered Substrates for Vertical Power Device Fabrication

K. Geens, imec,

H. Hahn, AIXTRON SE

H. Liang, imec,

M. Borga, imec

D. Cingu, imec

S. You, imec

M. Marx, AIXTRON SE

R. Oligschlaeger, AIXTRON SE

D. Fahle, AIXTRON SE

M. Heuken, AIXTRON SE

V. Odnoblyudov, Qromis, inc.

O. Aktas, Qromis, Inc.

C. Basceri, Qromis, Inc.

S. Decoutere, imec

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