8.4 Good Repeatability of AlGaN/GaN HEMT on 4” Si Substrate by 5x4” Multi-Wafer Production MOCVD System - CS MANTECH Conference CS MANTECH Conference

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Panfeng Ji, Peking University

Yuxia Feng, Peking University

Jianpeng Cheng, Peking University

Chunyan Song, Peking University

Xuelin Yang, Peking University

Bo Shen, Peking University

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