8.4 Good Repeatability of AlGaN/GaN HEMT on 4” Si Substrate by 5×4” Multi-Wafer Production MOCVD System

Panfeng Ji, Peking University
Yuxia Feng, Peking University
Jianpeng Cheng, Peking University
Chunyan Song, Peking University
Xuelin Yang, Peking University
Bo Shen, Peking University
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