9.2 Impact of Loading Effect on Retrograde Profile of CAMP Negative Photoresist in Metal Lift-off Applications - CS MANTECH Conference CS MANTECH Conference

9.2 Impact of Loading Effect on Retrograde Profile of CAMP Negative Photoresist in Metal Lift-off Applications

Sarang Kulkarni, Skyworks Solutions, Inc.

Tom Brown, Skyworks Solutions, Inc.

Shiban Tiku, Skyworks Solutions, Inc.

Manjeet Singh, Skyworks Solutions, Inc.

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