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9.3 Compatibility of AlN/SiNx Passivation Technique with High-Temperature Process
Mengyuan Hua, The Hong Kong University of Science and Technology
Yunyou Lu, The Hong Kong University of Science and Technology
Shenghou Liu, Xiamen San'an Integrated Circuit Co., Ltd.
Cheng Liu, Xiamen San'an Integrated Circuit Co., Ltd.
Kai Fu, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science
Yong Cai, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science
Baoshun Zhang, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Science
Kevin J. Chen, The Hong Kong University of Science and Technology
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