9.5.2021 Benzocyclonbute (BCB) Process Development and Optimization for High-Speed GaAs VCSELs and Photodetectors

Dufei Wu, University of Illinois at Urbana Champaign
Xin Yu, University of Illinois at Urbana-Champaign
Yu-Ting Peng, University of Illinois, Urbana-Champaign
Milton Feng, University of Illinois, Urbana-Champaign
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