9.5.2021 Benzocyclonbute (BCB) Process Development and Optimization for High-Speed GaAs VCSELs and Photodetectors

Dufei Wu, University of Illinois at Urbana Champaign

Xin Yu, University of Illinois at Urbana-Champaign

Yu-Ting Peng, University of Illinois, Urbana-Champaign

Milton Feng, University of Illinois, Urbana-Champaign

[embeddoc url=”http://csmantech.org/wp-content/uploads/Digest/Digests-2021/9.5.2021-CSMANTECH-2021-Extended-Abstract_DufeiWu.pdf” download=”all” viewer=”google”]

Download Paper