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A Simulation of Wafer Temperature-Time Profile in PVD Process Using an Exponential Model and Its Applications
Xiaokang Huang, Qorvo
Romek Bobkowski, Qorvo, Inc.
Duofeng Yue, Qorvo, Inc.
Craig Hall, Qorvo
Charles Dark, Qorvo
Arthur McGeown, SPTS Technologies Ltd.
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