ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs

Sen Huang*, Student Presentation , Hong Kong University of Science and Technology, Institute of Microelectronics Chinese Academy of Science

Qimeng Jiang, The Hong Kong University of Science and Technology

Shu Yang, The Hong Kong University of Science and Technology

Chunhua Zhou, Hong Kong University of Science and Technology