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ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
Sen Huang*, Student Presentation , Hong Kong University of Science and Technology, Institute of Microelectronics Chinese Academy of Science
Qimeng Jiang, The Hong Kong University of Science and Technology
Shu Yang, The Hong Kong University of Science and Technology
Chunhua Zhou, Hong Kong University of Science and Technology
