AlInN/GaN HEMTs on SiC and on Silicon with Regrown Ohmic Contacts by Selective Ammonia MBE

Stefano Tirelli, Millimeter-Wave Electronics Group, ETH-Zürich
Diego Marti, Millimeter-Wave Electronics Group, ETH-Zürich
Lorenzo Lugani, ICMP, École Polytechnique Fédérale de Lausanne (EPFL)
Marco Malinverni, ICMP, École Polytechnique Fédérale de Lausanne (EPFL)
J.-F. Carlin, ICMP, École Polytechnique Fédérale de Lausanne (EPFL)
E. Giraud, ICMP, École Polytechnique Fédérale de Lausanne (EPFL)
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