An E-beam Evaporation Deposition Process for Tantalum Nitride Thin Film Resistors

Lam Luu-Henderson, Skyworks Solutions Inc.
Shiban Tiku, Skyworks Solutions, Inc.
Hong Shen
Richard Bingle
Daniel Weaver
Gary Hu
Cristian Cismaru, Skyworks Solutions, Inc.
Mike Sun, Skyworks Solutions, Inc.
Skyworks Solutions
formerly of Skyworks Solutions
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