An E-beam Evaporation Deposition Process for Tantalum Nitride Thin Film Resistors

Lam Luu-Henderson
Shiban Tiku, Skyworks Solutions, Inc.
Hong Shen
Richard Bingle
Daniel Weaver
Gary Hu
Cristian Cismaru, Skyworks Solutions, Inc.
Mike Sun, Skyworks Solutions, Inc.
Skyworks Solutions
formerly of Skyworks Solutions
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