Comparative Study of AlGaN/GaN HEMTs with LPCVD- and PECVD-SiNx Passivation

Xinhua Wang, Institute of Microelectronics, Chinese Academy of Sciences
Sen Huang*, Student Presentation , Hong Kong University of Science and Technology, Institute of Microelectronics Chinese Academy of Science
Jinhan Zhang, University of Electronic Science and Technology of China
Yingkui Zheng, Chinese Academy of Sciences
Ke Wei, Institute of Microelectronics, Chinese Academy of Sciences
Xiaojuan Chen, Chinese Academy of Sciences
Guoguo Liu, Chinese Academy of Sciences
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