Diamond-coated High Density Vias for Silicon Substrate-side Thermal Management of GaN HEMTs

Marko J. Tadjer, U.S. Naval Research Laboratory
Karl D. Hobart, U.S. Naval Research Laboratory
Tatyana I. Feygelson, American Society for Engineering Education, United States Naval Research Lab. Universidad Politecnica de Madrid
Travis J. Anderson, U.S. Naval Research Laboratory
Andrew D. Koehler, U.S. Naval Research Laboratory
Ashu Wang, American Society for Engineering Education, United States Naval Research Lab. Universidad Politecnica de Madrid
Bradford B. Pate, American Society for Engineering Education, United States Naval Research Lab. Universidad Politecnica de Madrid
Fritz J. Kub, U.S. Naval Research Laboratory
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