Diamond-coated High Density Vias for Silicon Substrate-side Thermal Management of GaN HEMTs

Marko J. Tadjer, U.S. Naval Research Laboratory

Tatyana I. Feygelson, American Society for Engineering Education, United States Naval Research Lab. Universidad Politecnica de Madrid

Ashu Wang, American Society for Engineering Education, United States Naval Research Lab. Universidad Politecnica de Madrid

Bradford B. Pate, U.S. Naval Research Laboratory

Fritz J. Kub, U.S. Naval Research Laboratory

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