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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
May 11, 2022 // 3:00pm
9.4 Etching of GaAs/AlGaAs VCSEL Mesa for High Volume Production
Katie Hore, Oxford Instruments Plasma Technology
Ning Zhang, Oxford Instruments Plasma Technology
Stephanie Baclet, Oxford Instruments Plasma Technology
Ligang Deng, Oxford Instruments Plasma Technology
David Hooper, Oxford Instruments
Abstract
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