May 11, 2022 // 3:00pm

9.4 Etching of GaAs/AlGaAs VCSEL Mesa for High Volume Production

Katie Hore, Oxford Instruments Plasma Technology
Ning Zhang, Oxford Instruments Plasma Technology
Stephanie Baclet, Oxford Instruments Plasma Technology
Ligang Deng, Oxford Instruments Plasma Technology
David Hooper, Oxford Instruments
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