18.12 GaN-on-Si Membranes for Power Device Applications: Stress Evolution throughout Fabrication - CS MANTECH Conference CS MANTECH Conference

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May 12, 2022 // 3:20pm

18.12 GaN-on-Si Membranes for Power Device Applications: Stress Evolution throughout Fabrication

Jerome Cuenca, Cardiff University, Cardiff, UK

Oliver Williams, Cardiff University, Cardiff, UK

Martin Kuball, University of Bristol

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