18.3 Heater Performance Improvement with Ceramic Coatings for GaN MOCVD Process

May 12, 2022 // 3:20pm

T. Yamamoto, Momentive Technologies

B. Kozak, Momentive Technologies

Y. Morikawa, Momentive Technologies

T. Higuchi, Momentive Technologies

Y. Matsui, Momentive Technologies

D. Sabens, Momentive Technologies

P. Schmidt-Sane, Momentive Technologies

J. lennartz, Momentive Technologies

W. Fan, Momentive Technologies

C. Chen, Momentive Technologies

[embeddoc url=”https://csmantech.org/wp-content/uploads/2023/09/18.3.2022-Heater-Performance-Improvement-with-Ceramic-Coatings-for-GaN-MOCVD-Process.pdf” download=”all”]

Download Paper