May 12, 2022 // 3:20pm

18.3 Heater Performance Improvement with Ceramic Coatings for GaN MOCVD Process

T. Yamamoto, Momentive Technologies
B. Kozak, Momentive Technologies
Y. Morikawa, Momentive Technologies
T. Higuchi, Momentive Technologies
Y. Matsui, Momentive Technologies
D. Sabens, Momentive Technologies
P. Schmidt-Sane, Momentive Technologies
J. lennartz, Momentive Technologies
W. Fan, Momentive Technologies
C. Chen, Momentive Technologies
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