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May 12, 2022 // 3:20pm
18.3 Heater Performance Improvement with Ceramic Coatings for GaN MOCVD Process
T. Yamamoto, Momentive Technologies
B. Kozak, Momentive Technologies
Y. Morikawa, Momentive Technologies
T. Higuchi, Momentive Technologies
Y. Matsui, Momentive Technologies
D. Sabens, Momentive Technologies
P. Schmidt-Sane, Momentive Technologies
J. lennartz, Momentive Technologies
W. Fan, Momentive Technologies
C. Chen, Momentive Technologies
Abstract
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