High Performance Self-aligned AlN-GaN MISHEMT with In-situSiNxGate Dielectric and Regrown Source-Drain - CS MANTECH Conference CS MANTECH Conference

High Performance Self-aligned AlN-GaN MISHEMT with In-situSiNxGate Dielectric and Regrown Source-Drain

Xing Lu, Hong Kong University of Science and Technology

Jun Ma, Hong Kong University of Science and Technology

Peiqiang Xu, Hong Kong University of Science and Technology

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