Improved T-Gate Yield Using E-Beam Trilayer Resist Process

Huatang Chen, TriQuint Semiconductor, TX
Andrew Ketterson, Qorvo Inc.
Marcus King, TriQuint Semiconductor, TX
Keith Salzman, TriQuint Semiconductor, TX
Vicki Milam, TriQuint Semiconductor, TX
James Halvorson, TriQuint Semiconductor, TX
Jan Campbell