InAlN/GaN HEMTs With Over 100-GHz Ft Using an Improved Y-Gate Process by an i-line Stepper

Hiroyuki Ichikawa, Sumitomo Electric Industries, Ltd.

Isao Makabe, Sumitomo Electric Industries, Ltd.

Tsuyoshi Kouchi, Sumitomo Electric Industries, Ltd.

Ken Nakata, Sumitomo Electric Industries, Ltd.

Kazutaka Inoue, Sumitomo Electric Industries, Ltd.

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