16.2 Investigation of Silicon Nitride Shadowed Selective Area Growth as an Enabling Technology for GaN Vertical Device Processing - CS MANTECH Conference CS MANTECH Conference

May 12, 2022 // 1:50pm

16.2 Investigation of Silicon Nitride Shadowed Selective Area Growth as an Enabling Technology for GaN Vertical Device Processing

Matthew Landi, University of Illinois at Urbana-Champaign

Frank Kelly, University of Illinois at Urbana-Champaign

Kyekyoon Kim, University of Illinois at Urbana-Champaign

Student Presentation

Download Paper