16.2 Investigation of Silicon Nitride Shadowed Selective Area Growth as an Enabling Technology for GaN Vertical Device Processing

May 12, 2022 // 1:50pm

Matthew Landi, University of Illinois at Urbana-Champaign

Frank Kelly, University of Illinois at Urbana-Champaign

Kyekyoon Kim, University of Illinois at Urbana-Champaign

Student Presentation

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