Method for Forming Through Wafer Vias in GaN on SiC Devices and Circuits

Chia-Hao Chen, WIN Semiconductors Corp
Yu-Wei Chang, WIN Semiconductors Corp
Ming-Hung Weng, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Ricky Chang, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Shih-Hui Huang, WIN Semiconductors Corp
Fraser Wang, WIN Semiconductors Corp
Yi-Feng Wei, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Stanley Hsieh, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
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