Method for Forming Through Wafer Vias in GaN on SiC Devices and Circuits

Chia-Hao Chen, WIN Semiconductors Corp

Yu-Wei Chang, WIN Semiconductors Corp

Ming-Hung Weng, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.

Ricky Chang, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.

Shih-Hui Huang, WIN Semiconductors Corp

Fraser Wang, WIN Semiconductors Corp

Yi-Feng Wei, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.

Stanley Hsieh, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.

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