May 12, 2022 // 3:20pm

18.9 Optimization in Noble Metal Hard Mask Selectivity in Chlorine-Based Plasma Etch

Mohammadsadegh Beheshti, Skyworks Solutions Inc.
Samuel Mony, Skyworks Solutions, Inc.
Jiang Li, Skyworks Solutions, Inc.
Nercy Ebrahimi, Skyworks Solution Inc.
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