Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Attendee Registration
Attendee Registration OPEN!
Exhibit Hall is sold out
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Attendee Registration
SiN/Ge Lift-off: A Method for Patterning Films Deposited at High Temperature
A. MaaBdorf, Ferdinand-Braun-Institute, Jenoptik Diod Lab, LayTec AG
M. Zorn, JENOPTIK Diode Lab GmbH
O. Schulz, LayTec AG
J.-T. Zettler, LayTec AG
Download Paper