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SiN/Ge Lift-off: A Method for Patterning Films Deposited at High Temperature
A. MaaBdorf, Ferdinand-Braun-Institute, Jenoptik Diod Lab, LayTec AG
M. Zorn, JENOPTIK Diode Lab GmbH
O. Schulz, LayTec AG
J.-T. Zettler, LayTec AG
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