Study of new stepper solutions for various IoT devices

Ken-Ichiro MORI, CANON INC.
Noritoshi SAKAMOTO, CANON INC.
Douglas SHELTON, CANON U.S.A. INC.
Tomohiro OKAMOTO, CANON INC.
Hiroyuki MIYAZAKI, CANON INC.

To meet various process requirements from growing IoT devices, Canon has released FPA-3030iWa, FPA-3030i5+ and FPA-3030EX6 steppers based on the new FPA-3030 platform that is upgrade to the proven FPA-3000 stepper platform. In this paper, we will introduce FPA-3030iWa stepper solutions to support IoT device manufacturing and report evaluation data and advantages.

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