To meet various process requirements from growing IoT devices, Canon has released FPA-3030iWa, FPA-3030i5+ and FPA-3030EX6 steppers based on the new FPA-3030 platform that is upgrade to the proven FPA-3000 stepper platform. In this paper, we will introduce FPA-3030iWa stepper solutions to support IoT device manufacturing and report evaluation data and advantages.