The First 0.2um 6-Inch GaN-on-SiC MMIC Process

R. Isaak, MEC, BAE Systems, IQE
J. Diaz, MEC, BAE Systems, IQE
M. Gerlach, MEC, BAE Systems, IQE
J. Hulse, MEC, BAE Systems, IQE
L. Schlesinger, MEC, BAE Systems, IQE
P. Seekell, MEC, BAE Systems, IQE
W. Zhu, MEC, BAE Systems, IQE
W. Kopp, MEC, BAE Systems, IQE
X. Yang, MEC, BAE Systems, IQE
A. Stewart, MEC, BAE Systems, IQE
K. Chu, MEC, BAE Systems, IQE
P. C. Chao, MEC, BAE Systems, IQE
X. Gao, MEC, BAE Systems, IQE
M. Pan, MEC, BAE Systems, IQE
D. Gorka, MEC, BAE Systems, IQE
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