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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Conference
Conference at a Glance
Advance Program & Sessions
Sponsors
Exhibitor
Exhibitor Floorplan
Exhibitor add-ons
Authors
Digests
Contact
The Longer life wafer tray for MOCVD -AlN ceramics (FAN090) by solid phase sintering
N. Furukoshi, Furukawa DenshiI Co.,Ltd.
K. Mutoh, Furukawa DenshiI Co.,Ltd.
Y. Fukunaga, Furukawa DenshiI Co.,Ltd.
T. Yamamura, Furukawa DenshiI Co.,Ltd.
T. Iwata, Furukawa DenshiI Co.,Ltd.
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