The Longer life wafer tray for MOCVD -AlN ceramics (FAN090) by solid phase sintering

N. Furukoshi, Furukawa DenshiI Co.,Ltd.
K. Mutoh, Furukawa DenshiI Co.,Ltd.
Y. Fukunaga, Furukawa DenshiI Co.,Ltd.
T. Yamamura, Furukawa DenshiI Co.,Ltd.
T. Iwata, Furukawa DenshiI Co.,Ltd.
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