May 12, 2022 // 3:20pm

18.5 Warp of 4” Free-standing GaN Wafers

Xiaorong Luo, University of Electronic Science and Technology of China, Chengdu, China
Y. Yang, Global Communication Semiconductors, LLC
Troy Baker, Eta Research
Jinfeng Tang, Eta Research
Yun Lai, Eta Research

Abstract

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