Yield improvement of metal-insulator-metal capacitors in MMIC fabrication process based on AlGaN/GaN HFETs

S. A. Chevtchenko, Ferdinand-Braun-Institut (FBH)
S. Freyer, Ferdinand-Braun-Institute
L. Weixelbaum, Ferdinand-Braun-Institute
P. Kurpas, Ferdinand-Braun-Institut
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