A. MaaBdorf
Ferdinand-Braun-Institute, Jenoptik Diod Lab, LayTec AG
-
SiN/Ge Lift-off: A Method for Patterning Films Deposited at High Temperature
A. MaaBdorf, Ferdinand-Braun-Institute, Jenoptik Diod Lab, LayTec AGM. Zorn, JENOPTIK Diode Lab GmbHO. Schulz, LayTec AGJ.-T. Zettler, LayTec AG