A. Muraoka
Canon ANELVA Corporation
-
8.5.2023 Atomic Diffusion Bonding Using AlN and Al2O3 Films
T. Saito, Canon ANELVA CorporationH. Makita, Canon ANELVA CorporationY. Suzuki, Canon ANELVA CorporationY. Kozuka, Canon ANELVA CorporationA. Muraoka, Canon ANELVA CorporationH. Fukunaga, FRIS, Tohoku UniversityM. Uomoto, FRIS, Tohoku UniversityT. Shimatsu, FRIS, Tohoku University