Anoop Somanchi

KLA-Tencor Limited

  • 7.2 An Analysis of the Surface Morphology of the GaN-on-GaN Epi Wafers and the Control by the Substrate Off Angle

    Fumimasa Horikiri, Sciocs Company Limited
    Yoshinobu Narita, Sciocs Company Limited
    Takehiro Yoshida, Sciocs Company Limited
    Chikashi Ito, KLA-Tencor Limited
    Varun Gupta, KLA-Tencor Limited
    Anoop Somanchi, KLA-Tencor Limited
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