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Atsushi Kawashimo
Matsuda Sangyo Co., Ltd.
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11.1.5.2024 Electron-beam Deposition with Low- Spitting Platinum Source Material Improved by New Impurity Removal Processes
Atsushi Kawashimo, Matsuda Sangyo Co., Ltd.Takahiro Kobayashi, Matsuda Sangyo Co., Ltd.Masatoshi Koyama, Osaka Institute of TechnologyYuichiro Shindo, Matsuda Sangyo Co., Ltd.