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B. Jones
Swansea University
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May 12, 2022 // 3:20pm
18.13 Rounded Base Corners in SiC Trenches for Power MOSFETs
Kevin Riddell, SPTS, Newport, UKA. Croot, KLA Corporation (SPTS Division)C. Bolton, SPTS, Newport, UKB. Jones, Swansea UniversityF. Monaghan, Swansea University, Swansea, UKJ. Mitchell, KLA Corporation (SPTS Division)M. R. Jennings, Swansea University, Swansea, UKO. J. Guy, Centre for Integrative Semiconductor Materials (CISM),Download Paper -
3.1.4.2024 Plasma Dicing for High Yield SiC Singulation
A. Croot, KLA Corporation (SPTS Division)B. Jones, Swansea UniversityJ. Mitchell, KLA Corporation (SPTS Division)Huma Ashraf, KLA Corporation (SPTS Division)M Jennings, Swansea UniversityJanet Hopkins, KLA Corporation (SPTS Division)O. J. Guy, Centre for Integrative Semiconductor Materials (CISM),Loading...