Bo Shen
Peking University
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8.4 Good Repeatability of AlGaN/GaN HEMT on 4” Si Substrate by 5×4” Multi-Wafer Production MOCVD System
Panfeng Ji, Peking UniversityYuxia Feng, Peking UniversityJianpeng Cheng, Peking UniversityChunyan Song, Peking UniversityXuelin Yang, Peking UniversityBo Shen, Peking University