Carl Petteway
Nhanced Semiconductor
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May 01, 2019 // 11:40am – 12:10pm
8.4 CMP Process Development on III-V Substrates for 3D Heterogeneous Integration
Miguel Urteaga, Teledyne Scientific CompanyAndy Carter, Teledyne Scientific CompanySangki Hong, Nhanced SemiconductorRobert Patti, Nhanced SemiconductorCarl Petteway, Nhanced SemiconductorGill Fountain, Nhanced Semiconductor