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Cheng-Yu Chen
IntelliEpi Inc.,
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2.2 Hybrid NH3/N2 Molecular Beam Epitaxy with Artificial-Intelligence-Assisted Reflection High-Energy Electron Diffraction Analysis
Young-Kyun Noh, IVWorks Co., Ltd.,Hong-Kyun Noh, VWorks Co., Ltd.,Byung-Guon Park, IVWorks Co., Ltd.,Seullam Kim, IVWorks Co., Ltd.,Cheng-Yu Chen, IntelliEpi Inc.,Tsung-Pei Chin, IntelliEpi Inc.Wei Li, IntelliEpi Inc.Yung-Chung Kao, IntelliEpi Inc. -
2.2.2021 Hybrid NH3/N2 Molecular Beam Epitaxy with Artificial-Intelligence-Assisted Reflection High-Energy Electron Diffraction Analysis
Young-Kyun Noh, IVWorks Co., Ltd.,Hong-Kyun Noh, VWorks Co., Ltd.,Byung-Guon Park, IVWorks Co., Ltd.,Seullam Kim, IVWorks Co., Ltd.,Cheng-Yu Chen, IntelliEpi Inc.,Tsung-Pei Chin, IntelliEpi Inc.Wei Li, IntelliEpi Inc.Yung-Chung Kao, IntelliEpi Inc.Download Paper