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D. Sabens
Momentive Technologies
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May 12, 2022 // 3:20pm
18.3 Heater Performance Improvement with Ceramic Coatings for GaN MOCVD Process
T. Yamamoto, Momentive TechnologiesB. Kozak, Momentive TechnologiesY. Morikawa, Momentive TechnologiesT. Higuchi, Momentive TechnologiesY. Matsui, Momentive TechnologiesD. Sabens, Momentive TechnologiesP. Schmidt-Sane, Momentive TechnologiesJ. lennartz, Momentive TechnologiesW. Fan, Momentive TechnologiesC. Chen, Momentive TechnologiesDownload Paper