A nanoindentation induced blistering method has been used to extract the GaN/diamond interfacial toughness (adhesion energy) from four types of GaN-on-diamond samples with varying SiNx interlayer thicknesses. The mode I energy release rate (GIC) was quantified and is presented. Additionally, transient thermoreflectance has been used to measure the thermal boundary resistance (TBR) between the GaN and the diamond substrate. It was found that a thin SiNx interlayer resulted in a lower TBR (15 m2 K GW-1) whilst maintaining a reasonable interfacial toughness (1.4±0.5 J m-2). For interlayers of a similar thickness, samples with a high interfacial toughness and high residual stresses in the GaN had a smaller TBR. This indicates that the intrinsic interfacial characteristics that enhanced the interfacial toughness could be beneficial in improving the TBR.
Element Six Technologies
GaN-on-diamond: the correlation between interfacial toughness and thermal resistanceDaniel Francis, Element Six TechnologiesDaniel Field, University of BristolCaho Yuan, University of BristolRoland Simon, Thermap SolutionsDaniel Twitchen, Element Six TechnologiesFirooz Faili, Element Six Technologies, Santa Clara, CADong Liu, University of Oxford, University of BristolMatin Kuball, University of Bristol, Bristol, UK,Download Paper
16.1 Effect of Manufacture on the Microstructure of GaN-on-DiamondDong Liu, University of Oxford, University of BristolDaniel Francis, Element Six TechnologiesFirooz Faili, Element Six Technologies, Santa Clara, CAJames Pomeroy, University of Bristol, Bristol, UK and 3TherMap Solutions, Bristol, UKDaniel Twitchen, Element Six TechnologiesMartin Kuball, University of Bristol
20.10 Overcoming High Power Limitation of Thin Film Resistors at GHz Frequencies Using CVD Diamond SubstratesJulian Anaya, Anaya Scientific ConsultancyThomas Obeloer, Element Six, Harwell, UKDaniel Twitchen, Element Six Technologies
8a.4 GaN-on-Diamond: Robust Mechanical and Thermal PropertiesMartin Kuball, University of BristolHuarui Sun, University of BristolDong Liu, University of Oxford, University of BristolJames Pomeroy, University of Bristol, Bristol, UK and 3TherMap Solutions, Bristol, UKDaniel Francis, Element Six TechnologiesFirooz Faili, Element Six Technologies, Santa Clara, CADaniel Twitchen, Element Six Technologies