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David Hooper
Oxford Instruments
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May 11, 2022 // 3:00pm
9.4 Etching of GaAs/AlGaAs VCSEL Mesa for High Volume Production
Katie Hore, Oxford Instruments Plasma TechnologyNing Zhang, Oxford Instruments Plasma TechnologyStephanie Baclet, Oxford Instruments Plasma TechnologyLigang Deng, Oxford Instruments Plasma TechnologyDavid Hooper, Oxford InstrumentsDownload Paper