Douglas Katzer
US Naval Research Laboratory
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13.2 Epitaxial ScAlN Etch-Stop Layers Grown by Molecular Beam Epitaxy for Selective Etching of AlN and GaN
Download PaperMatthew Hardy, US Naval Research LaboratoryBrian Downey, US Naval Research LaboratoryDavid Meyer, US Naval Research LaboratoryNeeraj Nepal, US Naval Research LaboratoryDavid Storm, US Naval Research LaboratoryDouglas Katzer, US Naval Research Laboratory