Loading...
Dr. A. Mazzalai
BU Semiconductor, Evatec AG, Trübbach (SG),
-
9.3.2021 Developing production process for high performance piezoelectrics in MEMS applications
Dr. A. Mazzalai, BU Semiconductor, Evatec AG, Trübbach (SG),Dr. X. Yao, BU Semiconductor, Evatec AG, Trübbach (SG),Download Paper