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Dr. X. Yao
BU Semiconductor, Evatec AG, Trübbach (SG),
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9.3.2021 Developing production process for high performance piezoelectrics in MEMS applications
Dr. A. Mazzalai, BU Semiconductor, Evatec AG, Trübbach (SG),Dr. X. Yao, BU Semiconductor, Evatec AG, Trübbach (SG),Download Paper