Eleanor Rackoff

Qorvo, USA
  • May 12, 2022 // 11:30am

    15.3 Characterization of Electrostatic Chuck (ESC) Performance with Changes in Wafer Warpage, and Backside Cooling Conditions

    Saman Parizi, Qorvo, USA
    Eleanor Rackoff, Qorvo, USA
    John Setty, Qorvo, USA

    Abstract

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