Eugene Imhoff
Naval Research Laboratory
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13.1 High Aspect Ratio Vias in Silicon Carbide Etched by Inductively-Coupled Plasma
Marko Tadjer, Naval Research LaboratoryLunet Luna, U.S. Naval Research LaboratoryEugene Imhoff, Naval Research LaboratoryTravis Anderson, Naval Research LaboratoryKarl Hobart, Naval Research LaboratoryFritz Kub, Naval Research Laboratory