Eugene Imhoff

Naval Research Laboratory

  • 13.1 High Aspect Ratio Vias in Silicon Carbide Etched by Inductively-Coupled Plasma

    Marko Tadjer, U.S. Naval Research Laboratory
    Lunet Luna, U.S. Naval Research Laboratory
    Eugene Imhoff, Naval Research Laboratory
    Karl D. Hobart, U.S. Naval Research Laboratory
    Fritz Kub, Naval Research Laboratory
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