F. van Raay
Fraunhofer Institute for Applied Solid State Physics
-
From Epitaxy to Backside Process: Reproducible AlGaN/GaN HEMT Technology for Reliable and Rugged Power Devices
W. Bronner, Fraunhofer Institute for Applied Solid State PhysicsP. Waltereit, Fraunhofer InstituteS. Müller, Fraunhofer InstituteM. Dammann, Fraunhofer Institute for Applied Solid State PhysicsR. Kiefer, Fraunhofer Institute for Applied Solid State PhysicsPh. Dennler, Fraunhofer Institute for Applied Solid State PhysicsF. van Raay, Fraunhofer Institute for Applied Solid State PhysicsM. Mußer, Fraunhofer Institute for Applied Solid State PhysicsR. Quay, Fraunhofer Institute for Applied Solid State PhysicsM. Mikulla, Fraunhofer Institute