It is well known that vertical GaN devices could surpass current lateral GaN switch technology due to higher critical electric fields and higher breakdown voltages from its different geometry, and lower impurity concentration from the superior quality of homoepitaxial films. However, the inconsistency of GaN substrate properties, both within wafer and vendor-to-vendor, makes reliable device fabrication difficult. Here we implement long-range spectroscopic studies of GaN substrates and epitaxial wafers using Raman, photoluminescence, and optical profilometry to assess incoming material and correlate to electrical performance of vertical diodes. We have classified incoming wafers into two general types, and determined that inhomogeneities in the wafers can negatively affect the reverse leakage current of PiN diodes.
Francis Kub
U.S. Naval Research Laboratory
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Predicting Vertical GaN Diode Quality using Long Range Optical tests on Substrates
Francis Kub, U.S. Naval Research LaboratoryJames Gallagher, U.S. Naval Research LaboratoryAndrew Koehler, U. S. Naval Research LaboratoryMona Ebrish, NRC Postdoc Fellow Residing at the U.S. Naval Research LaboratoryMichael Mastro, U.S. Naval Research LaboratoryJennifer Hite, U.S. Naval Research LaboratoryKarl Holbart, U.S. Naval Research LaboratoryDownload Paper -
18.3 Threshold Voltage Control by Tuning Charge in ZrO2 Gate Dielectrics for Normally-off AlGaN/GaN MOS-HEMTs
Virginia Wheeler, U.S. Naval Research LaboratoryDavid Shahin, University of MarylandMarko Tadjer, U.S. Naval Research LaboratoryLunet Luna, U.S. Naval Research LaboratoryAndrew Koehler, U. S. Naval Research LaboratoryKarl D. Hobart, U.S. Naval Research LaboratoryFrancis Kub, U.S. Naval Research LaboratoryCharles Eddy, US Naval Research LaboratoryJr., Naval Research Laboratory -
9.1 Improvements in the Annealing of Ion Implanted III-Nitride Materials and Related Devices
Jordan Greenlee, NRC Postdoctoral Fellow Residing at the Naval Research LaboratoryBoris Feigelson, Naval Research LaboratoryJennifer Hite, U.S. Naval Research LaboratoryKarl D. Hobart, U.S. Naval Research LaboratoryFrancis Kub, U.S. Naval Research Laboratory -
10b.4 Reliability Assessment of Thermally-Stable Gate Materials for AlGaN/GaN HEMTs
David Shahin, University of MarylandJordan Greenlee, NRC Postdoctoral Fellow Residing at the Naval Research LaboratoryAndrew Koehler, U. S. Naval Research LaboratoryVirginia Wheeler, U.S. Naval Research LaboratoryMarko Tadjer, U.S. Naval Research LaboratoryTatyana Feygelson, U. S. Naval Research LaboratoryBradford Pate, Naval Research LaboratoryJennifer Hite, U.S. Naval Research LaboratoryKarl D. Hobart, U.S. Naval Research LaboratoryCharles Eddy, US Naval Research LaboratoryJr., Naval Research LaboratoryFrancis Kub, U.S. Naval Research LaboratoryAris Christou, University of Maryland-College Park -
11.2 Effect of Surface Passivation on Current Collapse of Proton-Irradiated AlGaN/GaN HEMTs
Andrew Koehler, U. S. Naval Research LaboratoryMarko Tadjer, U.S. Naval Research LaboratoryBradley Weaver, U.S. Naval Research LaboratoryJordan Greenlee, NRC Postdoctoral Fellow Residing at the Naval Research LaboratoryDavid Shahin, University of MarylandKarl D. Hobart, U.S. Naval Research LaboratoryFrancis Kub, U.S. Naval Research Laboratory