Gary Hu
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An E-beam Evaporation Deposition Process for Tantalum Nitride Thin Film Resistors
Lam Luu-Henderson, Skyworks Solutions Inc.Shiban Tiku, Skyworks Solutions, Inc.Hong ShenRichard BingleDaniel WeaverGary HuCristian Cismaru, Skyworks Solutions, Inc.Mike Sun, Skyworks Solutions, Inc.Skyworks Solutionsformerly of Skyworks Solutions