Greg Halac
Avago Technologies
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11.4 A SiN Passivation for Improved Moisture Reliability of Au Interconnect With Low-K BCB ILD
Jonathan Abrokwah, Avago TechnologiesNathan Perkins, Avago TechnologiesScott Rumery, Avago TechnologiesGreg Halac, Avago TechnologiesRobert Long, Avago Technologies