H. Ogiya
Samco Inc.
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Recess Etching Process for AlGaN/GaN-HFET Devices Using In-Situ Monitoring
T. Nishimiya, Samco Inc.Y. Sakano, Samco Inc.H. Ogiya, Samco Inc.M. Hiramoto, Samco Inc. -
Improvement of LED Luminance Efficiency by Sapphire Nano PSS Etching
H. Ogiya, Samco Inc.T. Nishimiya, Samco Inc.M. Hiramoto, Samco Inc.S. Motoyama, Samco Inc.O. Tsuji -
Chlorine-Based ICP Etching for Improving the Luminance Efficiency in Nitride LEDs
H. Ogiya, Samco Inc.T. Nishimiya, Samco Inc.M. Hiramoto, Samco Inc.