Heiko Stegmann

Carl Zeiss Microscopy

  • 12.0.3.2024 3D Visualization and Characterization of SiC MOSFET Junctions Using EBIC and FIB-SEM Tomography

    Heiko Stegmann, Carl Zeiss Microscopy
    Greg Johnson, Carl Zeiss Microscopy
    David Taraci, Carl Zeiss Microscopy
    Andreas Rummel, Kleindiek Nanotechnik

    [embeddoc url=”https://csmantech.org/wp-content/uploads/2024/06/12.0.3.2024-3D-Visualization-and-Characterization-of-SiC-MOSFET-.pdf” download=”all”]